HYDROPLANE POLISHING OF SEMICONDUCTOR CRYSTALS

被引：29

作者：

GORMLEY, JV

MANFRA, MJ

CALAWA, AR

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1981年 / 52卷 / 08期

关键词：

D O I：

10.1063/1.1136763

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1256 / 1259

页数：4

相关论文

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