PREPARATION OF CUINS2 THIN-FILMS BY SINGLE-SOURCE MOCVD PROCESS USING BU2IN(SPR)CU(S2CNPRI2)

被引：53

作者：

NOMURA, R

SEKL, Y

MATSUDA, H

机构：

[1] Department of Applied Chemistry, Faculty of Engineering, Osaka University, Yamada-Oka, Suita

来源：

JOURNAL OF MATERIALS CHEMISTRY | 1992年 / 2卷 / 07期

关键词：

COPPER INDIUM SULFIDE; METAL-ORGANIC CHEMICAL VAPOR DEPOSITION; CHALCOPYRITE; SOLAR CELL;

D O I：

10.1039/jm9920200765

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Chalcopyrite CuInS2, thin layers were successfully prepared by a single-source metal-organic chemical vapour deposition (MOCVD) process using Bu2In(SPri)Cu(S2CNPr2i) as a new source material at 400-degrees-C of T(sub), under reduced pressure of ca. 0.8 Torr.

引用

收藏

页码：765 / 766

页数：2

相关论文

共 14 条

[1] TERNARY CHALCOGENIDE-BASED PHOTOELECTROCHEMICAL CELLS .4. FURTHER CHARACTERIZATION OF THE NORMAL-CULNS2 AND NORMAL-CULNSE2 AQUEOUS POLYSULFIDE SYSTEMS [J].

CAHEN, D ;

DAGAN, G ;

MIROVSKY, Y ;

HODES, G ;

GIRIAT, W ;

LUBKE, M .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (05) :1062-1070

[2]

CHANG LW, 1988, THIN SOLID FILMS, V144, P229

[3] PREPARATION AND PROPERTIES OF CULNS2 THIN-FILMS PRODUCED BY EXPOSING RF-SPUTTERED CU-IN FILMS TO AN H2S ATMOSPHERE [J].

GRINDLE, SP ;

SMITH, CW ;

MITTLEMAN, SD .

APPLIED PHYSICS LETTERS, 1979, 35 (01) :24-26

[4] GROWTH AND PROCESS IDENTIFICATION OF CUINS2 ON GAP BY CHEMICAL VAPOR-DEPOSITION [J].

HWANG, HL ;

SUN, CY ;

FANG, CS ;

CHANG, SD ;

CHENG, CH ;

YANG, MH ;

LIN, HH ;

TUWANMU, H .

JOURNAL OF CRYSTAL GROWTH, 1981, 55 (01) :116-124

[5] CHARACTERIZATION OF RF-SPUTTERED CUINSE2 FILMS [J].

KRISHNASWAMY, SV ;

MANOCHA, AS ;

SZEDON, JR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :510-511

[6] SULFUR-DOPED INDIUM OXIDE THIN-FILMS AS A NEW TRANSPARENT AND CONDUCTIVE LAYER PREPARED BY OMCVD PROCESS USING BUTYLINDIUM THIOLATE [J].

NOMURA, R ;

KONISHI, K ;

MATSUDA, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (02) :631-632

[7] OXYGEN-CONTAINING OR SULFUR-CONTAINING ORGANOINDIUM COMPOUNDS FOR PRECURSORS OF INDIUM OXIDE AND SULFIDE THIN-FILMS [J].

NOMURA, R ;

FUJII, S ;

KANAYA, K ;

MATSUDA, H .

POLYHEDRON, 1990, 9 (2-3) :361-366

[8] PREPARATION OF COPPER-INDIUM-SULFIDE THIN-FILMS BY SOLUTION PYROLYSIS OF ORGANOMETALLIC SOURCES [J].

NOMURA, R ;

KANAYA, K ;

MATSUDA, H .

CHEMISTRY LETTERS, 1988, (11) :1849-1850

[9] SINGLE-SOURCE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION PROCESS FOR SULFIDE THIN-FILMS - INTRODUCTION OF A NEW ORGANOMETALLIC PRECURSOR BUNIN(SPRI)2 AND PREPARATION OF IN2S3 THIN-FILMS [J].

NOMURA, R ;

KONISHI, K ;

MATSUDA, H .

THIN SOLID FILMS, 1991, 198 (1-2) :339-345

[10] PREPARATION OF CUIN5S8 THIN-FILMS BY SINGLE-SOURCE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION [J].

NOMURA, R ;

SEKI, Y ;

MATSUDA, H .

THIN SOLID FILMS, 1992, 209 (02) :145-147