X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF SI-C FILM GROWTH BY CHEMICAL VAPOR-DEPOSITION OF ETHYLENE ON SI(100)

被引：35

作者：

TAYLOR, PA

BOZACK, M

CHOYKE, WJ

YATES, JT

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 03期

关键词：

D O I：

10.1063/1.343045

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1099 / 1105

页数：7

共 32 条

[1]

APPLEBAUM JA, 1978, SURF SCI, V74, P21

[2]

BAUER GH, 1985, J NONCRYST SOLIDS, V7778, P873

[3] VELOCITY DISTRIBUTION AND ANGULAR-DISTRIBUTION OF MOLECULAR-BEAMS FROM MULTICHANNEL ARRAYS [J].

BEIJERINCK, HCW ;

VERSTER, NF .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) :2083-2091

[4] METHODS IN SEMICONDUCTOR SURFACE-CHEMISTRY [J].

BOZACK, MJ ;

MUEHLHOFF, L ;

RUSSELL, JN ;

CHOYKE, WJ ;

YATES, JT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :1-8

[5] STUDIES OF SIC FORMATION ON SI (100) BY CHEMICAL VAPOR-DEPOSITION [J].

BOZSO, F ;

YATES, JT ;

CHOYKE, WJ ;

MUEHLHOFF, L .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :2771-2778

[6] ELECTRON-SPECTROSCOPY STUDY OF SIC [J].

BOZSO, F ;

MUEHLHOFF, L ;

TRENARY, M ;

CHOYKE, WJ ;

YATES, JT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (03) :1271-1274

[7] QUANTITATIVE ISS/XPS MEASUREMENTS ON HDS CATALYSTS [J].

BRINEN, JS ;

DAVIGNON, DA ;

MEYERS, EA ;

DENG, PT ;

BEHNKEN, DW .

SURFACE AND INTERFACE ANALYSIS, 1984, 6 (06) :295-301

[8] DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS [J].

CAMPBELL, CT ;

VALONE, SM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :408-411

[9] BREMSSTRAHLUNG-INDUCED AUGER PEAKS [J].

CASTLE, JE ;

WEST, RH .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1980, 18 (04) :355-358

[10] ON THE INFLUENCE OF ELASTIC-SCATTERING ON ASYMMETRIC XP-SIGNAL DISTRIBUTION [J].

EBEL, H ;

EBEL, MF ;

JABLONSKI, A .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1985, 35 (1-2) :155-164

← 1 2 3 4 →