STRUCTURE AND CHEMISTRY OF SILICON SURFACES AFTER PRESPUTTERING AND BACKSPUTTERING, STUDIED WITH AUGER SPECTROSCOPY, ELLIPSOMETRY, AND RHEED

被引：16

作者：

CHANG, CC ^{[1
]}

PETROFF, P ^{[1
]}

QUINTANA, G ^{[1
]}

SOSNIAK, J ^{[1
]}

机构：

[1] BELL LABS INC,MURRAY HILL,NJ 07974

来源：

SURFACE SCIENCE | 1973年 / 38卷 / 02期

关键词：

D O I：

10.1016/0039-6028(73)90166-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：341 / 356

页数：16

相关论文

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