共 33 条
[1]
OPTICAL-SYSTEM FOR A LOW-ENERGY FOCUSED ION-BEAM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1989, 7 (01)
:79-82
[4]
AOYAGI Y, UNPUB
[5]
DAMAGE AND CONTAMINATION-FREE GAAS AND ALGAAS ETCHING USING A NOVEL ULTRAHIGH-VACUUM REACTIVE ION-BEAM ETCHING SYSTEM WITH ETCHED SURFACE MONITORING AND CLEANING METHOD
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (03)
:677-680
[6]
ASAKAWA K, 1986, 18TH C SOL STAT DEV, P129
[7]
THE THERMAL AND ION-ASSISTED REACTIONS OF GAAS(100) WITH MOLECULAR CHLORINE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1986, 4 (04)
:794-805
[10]
A SIMPLE-MODEL OF THE CHEMICALLY ASSISTED ION-BEAM ETCHING YIELD OF GAAS WITH CL2 AT MEDIUM CURRENT DENSITIES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1990, 8 (06)
:1798-1803