PREPARATION OF ZINC-SULFIDE THIN-FILMS BY ULTRASONIC SPRAY PYROLYSIS FROM BIS(DIETHYLDITHIOCARBAMATO)ZINC(II)

被引：94

作者：

PIKE, RD

CUI, H

KERSHAW, R

DWIGHT, K

WOLD, A

BLANTON, TN

WERNBERG, AA

GYSLING, HJ

机构：

[1] EASTMAN KODAK CO,DIV ANALYT TECHNOL,ROCHESTER,NY 14650

[2] EASTMAN KODAK CO,CORP RES LABS,ROCHESTER,NY 14650

来源：

THIN SOLID FILMS | 1993年 / 224卷 / 02期

关键词：

D O I：

10.1016/0040-6090(93)90436-S

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of zinc sulfide were prepared by ultrasonically spraying a toluene solution of bis(diethyldithiocarbamato)zinc(II) onto silicon, sapphire and gallium arsenide substrates at 460-520-degrees-C. The films prepared on silicon or sapphire were found to have a highly oriented hexagonal structure, while those deposited onto cubic (100) gallium arsenide showed a highly oriented cubic structure. The films were characterized by X-ray diffraction analysis, ellipsometry, scanning electron microscopy, and IR spectroscopy.

引用

收藏

页码：221 / 226

页数：6

相关论文

共 37 条

[1] ANTIREFLECTION COATINGS FOR GERMANIUM IR OPTICS - A COMPARISON OF NUMERICAL DESIGN METHODS [J].

AGUILERA, JA ;

AGUILERA, J ;

BAUMEISTER, P ;

BLOOM, A ;

COURSEN, D ;

DOBROWOLSKI, JA ;

GOLDSTEIN, FT ;

GUSTAFSON, DE ;

KEMP, RA .

APPLIED OPTICS, 1988, 27 (14) :2832-2840

[2] RAMAN EFFECT IN WURTZITE- AND ZINC-BLENDE-TYPE ZNS SINGLE CRYSTALS [J].

BRAFMAN, O ;

MITRA, SS .

PHYSICAL REVIEW, 1968, 171 (03) :931-&

[3]

DRUZ BL, 1990, INORG MATER+, V26, P24

[4] CHARACTERIZATION OF SPUTTERED ZINC-SULFIDE FILMS [J].

EMMA, T ;

MCDONOUGH, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :362-364

[5] ORIENTED THIN-FILMS OF CDS GROWN ON GLASS AND INP (111)A BY THERMAL-DECOMPOSITION OF ORGANO-METALLIC COMPOUNDS [J].

EVANS, MAH ;

WILLIAMS, JO .

THIN SOLID FILMS, 1982, 87 (01) :L1-L2

[6] GROWTH OF EPITAXIAL AND HIGHLY ORIENTED THIN-FILMS OF CADMIUM AND CADMIUM ZINC-SULFIDE BY LOW-PRESSURE METALORGANIC CHEMICAL VAPOR-DEPOSITION USING DIETHYLDITHIOCARBAMATES [J].

FRIGO, DM ;

KHAN, OFZ ;

OBRIEN, P .

JOURNAL OF CRYSTAL GROWTH, 1989, 96 (04) :989-992

[7] GROWTH OF ZNS BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].

FUJITA, S ;

TOMOMURA, Y ;

SASAKI, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (09) :L583-L585

[8] INDIUM DOPING EFFECTS ON VAPOR-PHASE GROWTH OF ZNS ON GAP [J].

FUKE, S ;

ARAKI, H ;

KUWAHARA, K ;

IMAI, T .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) :1761-1763

[9] GROWTH AND CHARACTERIZATION OF ZIRCONIUM-OXIDE FILMS [J].

GAO, YM ;

WU, P ;

KERSHAW, R ;

DWIGHT, K ;

WOLD, A .

MATERIALS RESEARCH BULLETIN, 1990, 25 (07) :871-876

[10] GROWTH AND CHARACTERIZATION OF ZINC-SULFIDE FILMS BY CONVERSION OF ZINC-OXIDE FILMS WITH H2S [J].

GAO, YM ;

WU, P ;

BAGLIO, J ;

DWIGHT, K ;

WOLD, A .

MATERIALS RESEARCH BULLETIN, 1989, 24 (10) :1215-1221

← 1 2 3 4 →