GROWTH AND CHARACTERIZATION OF ZIRCONIUM-OXIDE FILMS

被引：12

作者：

GAO, YM

WU, P

KERSHAW, R

DWIGHT, K

WOLD, A

机构：

[1] Department of Chemistry, Brown University Providence

来源：

MATERIALS RESEARCH BULLETIN | 1990年 / 25卷 / 07期

基金：

美国国家科学基金会;

关键词：

Heat Treatment - Annealing;

D O I：

10.1016/0025-5408(90)90064-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Zirconium oxide films were deposited on silicon substrates by nebulizing alcohol solutions of zirconium acetylacetonate followed by pyrolysis and annealing of the oxide film in flowing oxygen for 30 minutes. The homogeneous uniform films obtained showed comparable properties to those reported from more elaborate procedures. The simplicity of this technique of ultrasonic nebulization and pyrolysis is of interest because of the commercial desirability of zirconium oxide films. © 1990.

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收藏

页码：871 / 876

页数：6

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