AN ANOMALOUS INCREASE OF THRESHOLD VOLTAGES WITH SHORTENING THE CHANNEL LENGTHS FOR DEEPLY BORON-IMPLANTED N-CHANNEL MOSFETS

被引:22
作者
NISHIDA, M
ONODERA, H
机构
关键词
D O I
10.1109/T-ED.1981.20494
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1101 / 1103
页数:3
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