BASIC MECHANISMS IN LASER ETCHING AND DEPOSITION

[11] AYLETT MR, 1983, MATER RES SOC S P, V17, P177

[12] BAUFAY L, UNPUB

[13] BAUM TH, 1986, J VAC SCI TECHNOL B

[14] BAUM TH, 1986, APPL PHYS LETT

[15] BENEKING H, 1984, SPRINGER SER CHEM PH, V39, P188

[16] LOCALIZED WET-CHEMICAL ETCHING OF INP INDUCED BY LASER-HEATING [J]. APPLIED PHYSICS LETTERS, 1983, 43 (06) : 574 - 576

[17] EFFECT OF SURFACE IRRADIATION, SUBSTRATE-TEMPERATURE, AND ANNEALING ON LASER DEPOSITED SILICON DIOXIDE [J]. APPLIED PHYSICS LETTERS, 1984, 45 (09) : 979 - 981

[18] BOYER PK, 1983, MATER RES SOC S P, V17, P119

[19] Braichotte D., 1984, SPRINGER SER CHEM PH, V39, P183

[20] EXCIMER LASER ETCHING OF POLYIMIDE [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) : 2036 - 2043

[11] AYLETT MR, 1983, MATER RES SOC S P, V17, P177

[12] BAUFAY L, UNPUB

[13] BAUM TH, 1986, J VAC SCI TECHNOL B

[14] BAUM TH, 1986, APPL PHYS LETT

[15] BENEKING H, 1984, SPRINGER SER CHEM PH, V39, P188

[16] LOCALIZED WET-CHEMICAL ETCHING OF INP INDUCED BY LASER-HEATING [J]. APPLIED PHYSICS LETTERS, 1983, 43 (06) : 574 - 576

[17] EFFECT OF SURFACE IRRADIATION, SUBSTRATE-TEMPERATURE, AND ANNEALING ON LASER DEPOSITED SILICON DIOXIDE [J]. APPLIED PHYSICS LETTERS, 1984, 45 (09) : 979 - 981

[18] BOYER PK, 1983, MATER RES SOC S P, V17, P119

[19] Braichotte D., 1984, SPRINGER SER CHEM PH, V39, P183

[20] EXCIMER LASER ETCHING OF POLYIMIDE [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) : 2036 - 2043