CHARACTERIZATION OF HYDROGEN-TERMINATED CVD DIAMOND SURFACES AND THEIR CONTACT PROPERTIES

被引:65
作者
KAWARADA, H
AOKI, M
SASAKI, H
TSUGAWA, K
机构
[1] School of Science and Engineering, Waseda University, Shinjuku-ku, Tokyo, 169
关键词
D O I
10.1016/0925-9635(94)90309-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Metal-diamond contact properties have been investigated on diamond (001) 2 x 1 surfaces. The 2 x 1 reconstruction has been examined by atomic-scale scanning tunnelling Microscopy. From ab initio molecular orbital calculations, the stablest structure of the 2 x 1 unit is a monohydride carbon dimer. On the surfaces the highest quality Schottky diodes have been fabricated using metals with lower electronegativities. The Schottky barrier heights depend on the metal electronegativity. Moreover ohmic contacts have been obtained in metals with higher electronegativities. These results indicate that the surface states are effectively reduced by the 2 x 1 surface reconstruction.
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页码:961 / 965
页数:5
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