HOT-CARRIER-INDUCED DEGRADATION OF THE BACK INTERFACE IN SHORT-CHANNEL SILICON-ON-INSULATOR MOSFETS

被引：36

作者：

OUISSE, T ^{[1
]}

CRISTOLOVEANU, S ^{[1
]}

BOREL, G ^{[1
]}

机构：

[1] INST NATL POLYTECH GRENOBLE,ECOLE NATL SUPER ELECTR & RADIOELECT GRENOBLE,CNRS,F-38016 GRENOBLE,FRANCE

来源：

IEEE ELECTRON DEVICE LETTERS | 1991年 / 12卷 / 06期

关键词：

D O I：

10.1109/55.82064

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The tolerance of silicon-on-insulator (SOI) MOSFET's to hot-carrier injection into the buried oxide is investigated. Stressing the back channel results in a reversible electron trapping and a formation of localized defects at the buried interface. This damage is responsible for the transconductance overshoot, large threshold voltage shift, and attenuated kink effect.

引用

页码：290 / 292

页数：3

共 8 条

[1] HOT-ELECTRON EFFECTS IN SILICON-ON-INSULATOR N-CHANNEL MOSFET
COLINGE, JP
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (10) : 2173 - 2177
[2] TWO-DIMENSIONAL MODELING OF LOCALLY DAMAGED SHORT-CHANNEL MOSFETS OPERATING IN THE LINEAR REGION
HADDARA, H
CRISTOLOVEANU, S
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (02) : 378 - 385
[3] PARAMETER EXTRACTION METHOD FOR INHOMOGENEOUS MOSFETS LOCALLY DAMAGED BY HOT CARRIER INJECTION
HADDARA, HS
CRISTOLOVEANU, S
[J]. SOLID-STATE ELECTRONICS, 1988, 31 (11) : 1573 - 1581
[4] EFFECTS OF LOCALIZED INTERFACE DEFECTS CAUSED BY HOT-CARRIER STRESS IN N-CHANNEL MOSFETS AT LOW-TEMPERATURE
NGUYENDUC, C
CRISTOLOVEANU, S
REIMBOLD, G
[J]. IEEE ELECTRON DEVICE LETTERS, 1988, 9 (09) : 479 - 481
[5] ELECTRON TRAPPING IN IRRADIATED SIMOX BURIED OXIDES
OUISSE, T
CRISTOLOVEANU, S
BOREL, G
[J]. IEEE ELECTRON DEVICE LETTERS, 1991, 12 (06) : 312 - 314
[6] STESMANS A, 1990, OCT P IEEE SOS SOI T, P162
[7] Woerlee P. H., 1989, International Electron Devices Meeting 1989. Technical Digest (Cat. No.89CH2637-7), P821, DOI 10.1109/IEDM.1989.74179
[8] TRAPPING CENTERS IN SPUTTERED SIO2-FILMS
WRIGHT, SW
ANDERSON, JC
[J]. THIN SOLID FILMS, 1979, 62 (01) : 89 - 96

← 1 →