LOW-ENERGY ELECTRON-ENERGY LOSS SPECTROSCOPY OF CL ADSORBED SI(111), SI(100) AND SI(110) SURFACES

被引：70

作者：

AOTO, N

IKAWA, E

KUROGI, Y

机构：

来源：

SURFACE SCIENCE | 1988年 / 199卷 / 03期

关键词：

D O I：

10.1016/0039-6028(88)90911-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

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页码：408 / 420

页数：13

相关论文

共 35 条

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[7] RATE-DETERMINING REACTIONS AND SURFACE SPECIES IN CVD OF SILICON .2. THE SIH2CL2-H2-N2-HCL SYSTEM
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