CHEMICAL VAPOR-DEPOSITION AND HOMOGENEOUS NUCLEATION IN MONOSILANE PYROLYSIS WITHIN INTERPARTICLE SPACES - APPLICATION OF FINES FORMATION ANALYSIS TO FLUIDIZED-BED CVD

被引：43

作者：

FURUSAWA, T ^{[1
]}

KOJIMA, T ^{[1
]}

HIROHA, H ^{[1
]}

机构：

[1] SEIKEI UNIV,DEPT IND CHEM,MUSASHINO,TOKYO 180,JAPAN

来源：

CHEMICAL ENGINEERING SCIENCE | 1988年 / 43卷 / 08期

关键词：

D O I：

10.1016/0009-2509(88)87081-7

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：2037 / 2042

页数：6

共 13 条

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[9]

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[10]

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