CURRENT VOLTAGE CHARACTERISTICS OF ION-BEAM SYNTHESIZED COSI2/SI SCHOTTKY-BARRIER DIODES

被引:6
作者
SPRAGGS, RS
PANANAKAKIS, G
BAUZA, D
REESON, KJ
SEALY, BJ
机构
[1] ECOLE NATL SUPER ELECTR & RADIOELECT,PHYS COMPOSANTS SEMICOND LAB,F-38016 GRENOBLE,FRANCE
[2] NAT HIST MUSEUM,DEPT MINERAL,LONDON SW7 5BD,ENGLAND
关键词
DIODES; SEMICONDUCTOR DEVICES AND MATERIALS;
D O I
10.1049/el:19920183
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The current/voltage characteristics of single crystal CoSi2 layers fabricated in (100)n-type silicon by high energy ion implantation have been investigated using mesa device structures prepared by wet chemical etching. The characteristics, measured at temperatures down to 100 K, are typical of Schottky barrier diodes. From the measurements the barrier height was found to be 0.64 +/- 0.01 eV. The ideality factor n (approximately 1.05 for T > 250 K) was found to increase as the temperature decreased suggesting that bulk recombination is taking place. The reverse breakdown voltage is found to vary but is in excess of 20 V.
引用
收藏
页码:296 / 298
页数:3
相关论文
共 11 条
[1]   ROLE OF METAL-SEMICONDUCTOR INTERFACE IN SILICON INTEGRATED-CIRCUIT TECHNOLOGY [J].
ANDREWS, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (06) :972-984
[2]  
Barbour J.C., 1988, MATER RES SOC S P, V107, P269
[3]  
LEVI AFJ, 1988, MATERIALS RES SOC S, V107, P259
[4]   COMPARISON OF SCHOTTKY-BARRIER HEIGHTS OF COSI2 FORMED FROM EVAPORATED OR CRYSTALLINE SI [J].
LIEN, CD ;
FINETTI, M ;
NICOLET, MA .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 35 (01) :47-50
[5]  
PRAMANIK D, 1990, SOLID STATE TECHNOL, V33, P73
[6]   CHARACTERISTICS OF LPCVD WISI2/N-SI SCHOTTKY CONTACTS [J].
SHENAI, K .
IEEE ELECTRON DEVICE LETTERS, 1991, 12 (04) :169-171
[7]   DOSE DEPENDENCE OF CRYSTALLINITY AND RESISTIVITY IN ION-BEAM SYNTHESIZED COSI2 LAYERS [J].
SPRAGGS, RS ;
REESON, KJ ;
GWILLIAM, RM ;
SEALY, BJ ;
DEVEIRMAN, A ;
VANLANDUYT, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4) :836-841
[8]  
SZE SM, 1981, PHYSICS SEMICONDUCTO
[9]   SINGLE-CRYSTAL SILICIDE SILICON INTERFACES - STRUCTURES AND BARRIER HEIGHTS [J].
TUNG, RT ;
GIBSON, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :987-991
[10]   SYNTHESIS OF HETEROEPITAXIAL SI/COSI2/SI STRUCTURES BY CO IMPLANTATION INTO SI [J].
VANOMMEN, AH ;
OTTENHEIM, JJM ;
THEUNISSEN, AML ;
MOUWEN, AG .
APPLIED PHYSICS LETTERS, 1988, 53 (08) :669-671