CONTOUR MODIFIERS FOR OPTICAL LITHOGRAPHY

被引：1

作者：

WHITE, LK

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 07期

关键词：

D O I：

10.1149/1.2096145

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1844 / 1846

页数：3

共 10 条

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BROWN AV, 1985, P SOC PHOTO-OPT INST, V539, P259, DOI 10.1117/12.947841

[4]

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[9]

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