OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION

[31] ALLOY SPUTTERING STUDIES WITH IN-SITU AUGER ELECTRON SPECTROSCOPY [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (06) : 2449 - &

[32] INSITU SPECTROCHEMICAL ANALYSIS OF SOLID-SURFACES BY ION-BEAM SPUTTERING [J]. ANALYTICAL CHEMISTRY, 1977, 49 (01) : A16 - &

[33] ENERGIEVERTEILUNG DER VON 2,5, 10 UND 15 KEV HE- UND AR-IONEN AN MOLYBDAN AUSGELOSTEN ELEKTRONEN [J]. ZEITSCHRIFT FUR PHYSIK, 1966, 193 (03): : 439 - &

[34] Westwood W. D., 1976, Progress in Surface Science, V7, P71, DOI 10.1016/0079-6816(76)90002-2

[35] ANALYSIS OF SPUTTERING DISCHARGE BY OPTICAL AND MASS-SPECTROMETRY .1. PLATINUM AND TANTALUM SPUTTERED IN ARGON [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) : 2610 - 2618

[36] CONTINUUM OPTICAL RADIATION PRODUCED BY LOW-ENERGY HEAVY PARTICLE BOMBARDMENT OF METAL TARGETS [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 419 - 425

[37] SURFACE COMPOSITION DETERMINED BY ANALYSIS OF IMPACT RADIATION - SURFACE CONSTITUENTS ARE DETERMINED BY AN ANALYSIS OF RADIATION FROM LOW-ENERGY PARTICLE SURFACE COLLISIONS [J]. SCIENCE, 1972, 177 (4048) : 481 - &

[38] MASS SPECTROMETRIC STUDY OF NEUTRAL PARTICLES SPUTTERED FROM CU BY 0- TO 100-EV AR IONS [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (04) : 1107 - &

[31] ALLOY SPUTTERING STUDIES WITH IN-SITU AUGER ELECTRON SPECTROSCOPY [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (06) : 2449 - &

[32] INSITU SPECTROCHEMICAL ANALYSIS OF SOLID-SURFACES BY ION-BEAM SPUTTERING [J]. ANALYTICAL CHEMISTRY, 1977, 49 (01) : A16 - &

[33] ENERGIEVERTEILUNG DER VON 2,5, 10 UND 15 KEV HE- UND AR-IONEN AN MOLYBDAN AUSGELOSTEN ELEKTRONEN [J]. ZEITSCHRIFT FUR PHYSIK, 1966, 193 (03): : 439 - &

[34] Westwood W. D., 1976, Progress in Surface Science, V7, P71, DOI 10.1016/0079-6816(76)90002-2

[35] ANALYSIS OF SPUTTERING DISCHARGE BY OPTICAL AND MASS-SPECTROMETRY .1. PLATINUM AND TANTALUM SPUTTERED IN ARGON [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) : 2610 - 2618

[36] CONTINUUM OPTICAL RADIATION PRODUCED BY LOW-ENERGY HEAVY PARTICLE BOMBARDMENT OF METAL TARGETS [J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F): : 419 - 425

[37] SURFACE COMPOSITION DETERMINED BY ANALYSIS OF IMPACT RADIATION - SURFACE CONSTITUENTS ARE DETERMINED BY AN ANALYSIS OF RADIATION FROM LOW-ENERGY PARTICLE SURFACE COLLISIONS [J]. SCIENCE, 1972, 177 (4048) : 481 - &

[38] MASS SPECTROMETRIC STUDY OF NEUTRAL PARTICLES SPUTTERED FROM CU BY 0- TO 100-EV AR IONS [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (04) : 1107 - &