ANALYSIS OF SPUTTERING DISCHARGE BY OPTICAL AND MASS-SPECTROMETRY .1. PLATINUM AND TANTALUM SPUTTERED IN ARGON

被引：27

作者：

WESTWOOD, WD ^{[1
]}

BOYNTON, RJ ^{[1
]}

机构：

[1] BELL NO RES LTD,OTTAWA,ONTARIO,CANADA

来源：

关键词：

D O I：

10.1063/1.1662622

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2610 / 2618

页数：9

共 17 条

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