METASTABLE AU-SI ALLOY FORMATION INDUCED BY ION-BEAM INTERFACE MIXING

被引:70
作者
TSAUR, BY [1 ]
MAYER, JW [1 ]
机构
[1] CALTECH,PASADENA,CA 91125
来源
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1981年 / 43卷 / 02期
关键词
D O I
10.1080/01418618108239414
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:345 / 361
页数:17
相关论文
共 30 条
[11]   FORMATION OF SILICON OXIDE OVER GOLD LAYERS ON SILICON SUBSTRATES [J].
HIRAKI, A ;
MAYER, JW ;
LUGUJJO, E .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (09) :3643-&
[12]   NON-CRYSTALLINE STRUCTURE IN SOLIDIFIED GOLD-SILICON ALLOYS [J].
KLEMENT, W ;
WILLENS, RH ;
DUWEZ, P .
NATURE, 1960, 187 (4740) :869-870
[13]  
KRUTENAT RC, 1971, METALL TRANS, V2, P1479
[14]   LIMITS OF COMPOSITION ACHIEVABLE BY ION-IMPLANTATION [J].
LIAU, ZL ;
MAYER, JW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05) :1629-1635
[15]  
NELSON RS, 1973, ION IMPLANTATION, P154
[16]   LEED-AES STUDY OF THE AU-SI(100) SYSTEM [J].
OURA, K ;
HANAWA, T .
SURFACE SCIENCE, 1979, 82 (01) :202-214
[17]   METASTABLE ALLOY FORMATION [J].
POATE, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05) :1636-1643
[18]  
PREDECKI P, 1965, T METALL SOC AIME, V233, P1438
[19]  
SHAEPEN F, 1977, METALLIC CLASSES, P114
[20]   ENERGY DENSITY AND TIME CONSTANT OF HEAVY-ION INDUCED ELASTIC-COLLISION SPIKES IN SOLIDS [J].
SIGMUND, P .
APPLIED PHYSICS LETTERS, 1974, 25 (03) :169-171