GROWTH OF EPITAXIAL (100) GAAS FILMS USING THE SINGLE-SOURCE PRECURSOR [ME2GA(MU-TERT-BU2AS)]2

被引:38
作者
MILLER, JE [1 ]
EKERDT, JG [1 ]
机构
[1] UNIV TEXAS,DEPT CHEM ENGN,AUSTIN,TX 78712
关键词
D O I
10.1021/cm00019a003
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
[No abstract available]
引用
收藏
页码:7 / 9
页数:3
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