MEASUREMENTS OF F-STAR, CF, AND CF2 FORMATION AND DECAY IN PULSED FLUOROCARBON DISCHARGES

被引：42

作者：

HANSEN, SG ^{[1
]}

LUCKMAN, G ^{[1
]}

COLSON, SD ^{[1
]}

机构：

[1] YALE UNIV,STERLING CHEM LAB,NEW HAVEN,CT 06511

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 17期

关键词：

D O I：

10.1063/1.100436

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1588 / 1590

页数：3

共 21 条

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