ADVANCES IN PARTIAL-PRESSURE CONTROL APPLIED TO REACTIVE SPUTTERING

被引：60

作者：

SPROUL, WD ^{[1
]}

RUDNIK, PJ ^{[1
]}

GOGOL, CA ^{[1
]}

MUELLER, RA ^{[1
]}

机构：

[1] LEYBOLD INFICON INC,E SYRACUSE,NY 13057

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 39卷 / 1-3期

关键词：

D O I：

10.1016/S0257-8972(89)80011-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：499 / 506

页数：8

共 14 条

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[3]

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[7]

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