A MODEL OF SI DIFFUSION IN GAAS BASED ON THE EFFECT OF THE FERMI LEVEL

被引:64
作者
YU, S [1 ]
GOSELE, UM [1 ]
TAN, TY [1 ]
机构
[1] MICROELECTR CTR N CAROLINA,RES TRIANGLE PK,NC 27709
关键词
D O I
10.1063/1.344176
中图分类号
O59 [应用物理学];
学科分类号
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页码:2952 / 2961
页数:10
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