MBE GROWTH OF LATTICE-MISMATCHED LAYERS - INXGA1-XAS/INAS AND INXGA1-XAS/INP FROM X = 1 TO X = 0

被引:17
作者
TABUCHI, M
NODA, S
SASAKI, A
机构
[1] Department of Electrical Engineering, Kyoto University, Kyoto
关键词
Microscopic Examination--Transmission Electron Microscopy - Molecular Beam Epitaxy - X-rays--Diffraction;
D O I
10.1016/0022-0248(90)90535-S
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We investigate growth phenomena of InxGa1-xAs (0≦x≦1) layers on various substrates such as InAs and InP. The layer quality depends not simply on the degree of lattice-mismatching, but also on the other factors such as two- or three-dimensional growth near the heterointerface, compound or alloy grown layers, and compressed or tensile strain. © 1990.
引用
收藏
页码:315 / 318
页数:4
相关论文
共 8 条
[1]   RHEED AND X-RAY CHARACTERIZATION OF INGAAS/GAAS GROWN BY MBE [J].
FUJITA, S ;
NAKAOKA, Y ;
UEMURA, T ;
TABUCHI, M ;
NODA, S ;
TAKEDA, Y ;
SASAKI, A .
JOURNAL OF CRYSTAL GROWTH, 1989, 95 (1-4) :224-227
[2]   GAAS-MESFET RING OSCILLATOR ON SI SUBSTRATE [J].
ISHIDA, T ;
NONAKA, T ;
YAMAGISHI, C ;
KAWARADA, Y ;
SANO, Y ;
AKIYAMA, M ;
KAMINISHI, K .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (06) :1037-1041
[3]   DEFECTS IN EPITAXIAL MULTILAYERS .1. MISFIT DISLOCATIONS [J].
MATTHEWS, JW ;
BLAKESLEE, AE .
JOURNAL OF CRYSTAL GROWTH, 1974, 27 (DEC) :118-125
[4]   CALCULATION OF CRITICAL LAYER THICKNESS VERSUS LATTICE MISMATCH FOR GEXSI1-X/SI STRAINED-LAYER HETEROSTRUCTURES [J].
PEOPLE, R ;
BEAN, JC .
APPLIED PHYSICS LETTERS, 1985, 47 (03) :322-324
[5]   MOCVD GROWTH OF GAAS ON SI SUBSTRATES WITH ALGAP AND STRAINED SUPERLATTICE LAYERS [J].
SOGA, T ;
HATTORI, S ;
SAKAI, S ;
TAKEYASU, M ;
UMENO, M .
ELECTRONICS LETTERS, 1984, 20 (22) :916-918
[6]   MOCVD GROWTH OF GAAS1-XPX(X=0-1) AND FABRICATION OF GAAS0.6P0.4 LED ON SI SUBSTRATE [J].
TAKEYASU, M ;
SAKAI, S ;
SOGA, T ;
UMENO, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (09) :1388-1392
[7]   EFFECTS OF THE SUBSTRATE OFFSET ANGLE ON THE GROWTH OF GAAS ON SI SUBSTRATE [J].
UEDA, T ;
NISHI, S ;
KAWARADA, Y ;
AKIYAMA, M ;
KAMINISHI, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (09) :L789-L791
[8]  
YOKOYAMA S, 1987, 19TH C SOL STAT DEV, P147