A NEW 3-MV TANDEM PELLETRON SYSTEM

被引:11
作者
SCHROEDER, JB
HOWELL, CW
NORTON, GA
机构
关键词
D O I
10.1016/S0168-583X(87)80242-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:763 / 766
页数:4
相关论文
共 11 条
[1]   DETECTION OF SEMICONDUCTOR DOPANTS USING ACCELERATOR MASS-SPECTROMETRY [J].
ANTHONY, JM ;
DONAHUE, DJ ;
JULL, AJT ;
ZABEL, TH .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY) :498-500
[2]   PIXE ANALYSIS OF THICK TARGETS [J].
CAMPBELL, JL ;
COOKSON, JA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 3 (1-3) :185-197
[3]  
CHU WK, 1978, BACKSCATTERING SPECT, P210
[4]   THE FRENCH AEC NUCLEAR MICROPROBE - DESCRIPTION AND 1ST APPLICATION EXAMPLES [J].
ENGELMANN, C ;
BARDY, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :209-216
[5]   ADHESION ENHANCEMENT INDUCED BY MEV ION-BEAMS [J].
LIVI, RP .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY) :545-548
[6]  
MEDENHALL MH, 1985, NUCL INSTRUM METH B, V10, P596
[7]   MEV IMPLANTATION FOR VLSI [J].
PRAMANIK, D ;
SAXENA, AN .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY) :493-497
[8]   PRODUCTION MEV ION IMPLANTERS FOR ENERGIES FROM 200 KEV TO 4 MEV [J].
RATHMELL, RD ;
NORTON, GA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :270-273
[9]   ION CHANNELING STUDY OF RADIATION-INDUCED DEFECTS IN A BENT SILICON CRYSTAL [J].
WANG, GH ;
CONG, PJ ;
GIBSON, WM ;
SUN, CR ;
KIM, IJ ;
SALMAN, S ;
PISHARODY, M ;
BAKER, SI ;
CARRIGAN, RA ;
FORSTER, JS ;
MITCHELL, IV .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :669-672
[10]  
ZIEGLER JF, 1975, NEW USES ION ACCELER, P160