STRUCTURAL CHARACTERIZATION OF AN SB DELTA-DOPING LAYER IN SILICON

被引：22

作者：

SLIJKERMAN, WFJ ^{[1
]}

ZAGWIJN, PM ^{[1
]}

VANDERVEEN, JF ^{[1
]}

VANGORKUM, AA ^{[1
]}

VANDEWALLE, GFA ^{[1
]}

机构：

[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 10期

关键词：

D O I：

10.1063/1.101690

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：963 / 965

页数：3

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