CAPACITANCE TRANSIENT ANALYSIS OF MOLECULAR-BEAM EPITAXIAL ETA-IN0.53GA0.47AS AND ETA-IN0.52AL0.48AS

被引:39
作者
WHITNEY, PS
LEE, W
FONSTAD, CG
机构
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
[2] MIT,CTR MAT SCI & ENGN,CAMBRIDGE,MA 02139
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 03期
关键词
D O I
10.1116/1.583753
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:796 / 799
页数:4
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