Study of an argon magnetron discharge used for molybdenum sputtering. II: spectroscopic analysis and comparison with the model

被引：23

作者：

Guimaraes, F. ^{[1
]}

Almeida, J. B. ^{[1
]}

Bretagne, J. ^{[2
]}

机构：

[1] Univ Minho, Fis Lab, P-4719 Braga, Codex, Portugal

[2] Univ Paris 11, CNRS, Phys Gaz & Plasmas Lab, UA 0073, F-91405 Orsay, France

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1993年 / 2卷 / 03期

关键词：

D O I：

10.1088/0963-0252/2/3/002

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

By optical emission spectroscopy the spectra of an argon magnetron discharge working with a molybdenum cathode was studied and quantitatively compared with the results of a kinetic model of the discharge. Some Arl 5p -> 4s transitions have been particularly used for this comparison. The behaviour of their intensities as functions of the discharge current and gas pressure was found to be in good agreement with the model. The intense MO lines emitted by the plasma are used, with help of the model, to determine MO atom densities in the plasma. The effect of the thermalization of MO atoms by the gas is discussed.

引用

页码：138 / 144

页数：7

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