DIAGNOSTICS BY OPTICAL-EMISSION SPECTROSCOPY IN THE VICINITY OF THE SUBSTRATE DURING MAGNETRON SPUTTERING OF TI

被引：10

作者：

PECH, T

CHABRERIE, JP

RICARD, A

机构：

[1] UNIV PARIS 11,CNRS,UNITE 73,PHYS GAZ & PLASMAS LAB,F-91405 ORSAY,FRANCE

[2] ECOLE SUPER ELECT,GRECO CONTACTS ELECT 40,F-91190 GIF SUR YVETTE,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.575463

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2987 / 2991

页数：5

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