HOT-CARRIER-INJECTED OXIDE REGION AND HOT-ELECTRON TRAPPING AS THE MAIN CAUSE IN SI NMOSFET DEGRADATION

被引:86
作者
TSUCHIYA, T
KOBAYASHI, T
NAKAJIMA, S
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关键词
D O I
10.1109/T-ED.1987.22934
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:386 / 391
页数:6
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