ELECTRICAL CHARACTERISTICS OF PALLADIUM SILICIDE

被引:47
作者
WITTMER, M
SMITH, DL
LEW, PW
NICOLET, MA
机构
关键词
D O I
10.1016/0038-1101(78)90029-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:573 / &
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