THE ROLE OF LOW-ENERGY ION-BOMBARDMENT DURING THE GROWTH OF EPITAXIAL TIN(100) FILMS BY REACTIVE MAGNETRON SPUTTERING - DEFECT FORMATION AND ANNIHILATION

被引：7

作者：

HULTMAN, L

HELMERSSON, U

BARNETT, SA

SUNDGREN, JE

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MAT SCI,COORDINATED SCI LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574946

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2162 / 2164

页数：3

共 13 条

[1] GREENE JE, 1984, CRC CR REV SOL STATE, V11, P189
[2] ION SURFACE INTERACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH BY SPUTTERING, MBE, AND PLASMA-ENHANCED CVD - APPLICATIONS TO SEMICONDUCTORS
GREENE, JE
BARNETT, SA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02): : 285 - 302
[3] HASAN MA, IN PRESS VACUUM
[4] EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THE X-RAY MICROSTRUCTURE OF THIN SILVER FILMS
HUANG, TC
LIM, G
PARMIGIANI, F
KAY, E
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2161 - 2166
[5] HULTMAN L, IN PRESS J APPL PHYS
[6] REACTIVELY MAGNETRON SPUTTERED HF-N FILMS .2. HARDNESS AND ELECTRICAL-RESISTIVITY
JOHANSSON, BO
SUNDGREN, JE
HELMERSSON, U
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (08) : 3112 - 3117
[7] GROWTH AND PROPERTIES OF SINGLE-CRYSTAL TIN FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING
JOHANSSON, BO
SUNDGREN, JE
GREENE, JE
ROCKETT, A
BARNETT, SA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02): : 303 - 307
[8] MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION
MARTIN, PJ
NETTERFIELD, RP
SAINTY, WG
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) : 235 - 241
[9] SIMULTANEOUS RHEED-AES-QMS STUDY ON EPITAXIAL SI FILM GROWTH ON SI(111) AND SAPPHIRE (-1102) SURFACES BY PARTIALLY IONIZED VAPOR-DEPOSITION
NARUSAWA, T
SHIMIZU, S
KOMIYA, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 366 - 368
[10] NETTERFIELD RP, 1985, APPL OPTICS, V24, P2246

← 1 2 →