CROSSHATCH PATTERNS IN GAAS FILMS ON SI SUBSTRATES DUE TO THERMAL STRAIN IN ANNEALING PROCESSES

被引：28

作者：

NISHIOKA, T ^{[1
]}

ITOH, Y ^{[1
]}

YAMAMOTO, A ^{[1
]}

YAMAGUCHI, M ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, IBARAKI ELECT COMMUN LABS, TOKAI, IBARAKI 31911, JAPAN

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 23期

关键词：

D O I：

10.1063/1.98303

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1928 / 1930

页数：3

共 14 条

[1] GROWTH OF SINGLE DOMAIN GAAS LAYER ON (100)-ORIENTED SI SUBSTRATE BY MOCVD
AKIYAMA, M
KAWARADA, Y
KAMINISHI, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1984, 23 (11): : L843 - L845
[2] SIGNIFICANT IMPROVEMENT IN CRYSTALLINE QUALITY OF MOLECULAR-BEAM EPITAXIALLY GROWN GAAS ON SI (100) BY RAPID THERMAL ANNEALING
CHAND, N
PEOPLE, R
BAIOCCHI, FA
WECHT, KW
CHO, AY
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (13) : 815 - 817
[3] DISLOCATION VELOCITIES IN GAAS
CHOI, SK
MIHARA, M
NINOMIYA, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (05) : 737 - 745
[4] MISFIT AND THREADING DISLOCATIONS IN GAAS-LAYERS GROWN ON SI SUBSTRATES BY MOCVD
ISHIDA, K
AKIYAMA, M
NISHI, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (03): : L163 - L165
[5] 14.5-PERCENT CONVERSION EFFICIENCY GAAS SOLAR-CELL FABRICATED ON SI SUBSTRATES
ITOH, Y
NISHIOKA, T
YAMAMOTO, A
YAMAGUCHI, M
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (23) : 1614 - 1616
[6] CROSS-HATCH PATTERN IN GAAS1-XPX EPITAXIALLY GROWN ON GAAS SUBSTRATE
KISHINO, S
OGIRIMA, M
KURATA, K
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (05) : 617 - &
[7] DEFECT REDUCTION BY THERMAL ANNEALING OF GAAS-LAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON SI SUBSTRATES
LEE, JW
SHICHIJO, H
TSAI, HL
MATYI, RJ
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (01) : 31 - 33
[8] NISHIOKA T, UNPUB
[9] NISHIOKA T, 1987, IN PRESS P MATER RES, V77
[10] EFFECT OF ELASTIC STRAIN ON ENERGY-BAND GAP AND LATTICE-PARAMETER IN III-V-COMPOUNDS
OLSEN, GH
NUESE, CJ
SMITH, RT
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) : 5523 - 5529

← 1 2 →