SIGNIFICANT IMPROVEMENT IN CRYSTALLINE QUALITY OF MOLECULAR-BEAM EPITAXIALLY GROWN GAAS ON SI (100) BY RAPID THERMAL ANNEALING

被引:144
作者
CHAND, N
PEOPLE, R
BAIOCCHI, FA
WECHT, KW
CHO, AY
机构
关键词
D O I
10.1063/1.97556
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:815 / 817
页数:3
相关论文
共 14 条
[1]   EPITAXY BY PERIODIC ANNEALING [J].
CHO, AY .
SURFACE SCIENCE, 1969, 17 (02) :494-&
[2]   DISLOCATION REDUCTION IN EPITAXIAL GAAS ON SI (100) [J].
FISCHER, R ;
NEUMAN, D ;
ZABEL, H ;
MORKOC, H ;
CHOI, C ;
OTSUKA, N .
APPLIED PHYSICS LETTERS, 1986, 48 (18) :1223-1225
[3]   GROWTH AND PROPERTIES OF GAAS/ALGAAS ON NONPOLAR SUBSTRATES USING MOLECULAR-BEAM EPITAXY [J].
FISCHER, R ;
MASSELINK, WT ;
KLEM, J ;
HENDERSON, T ;
MCGLINN, TC ;
KLEIN, MV ;
MORKOC, H ;
MAZUR, JH ;
WASHBURN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) :374-381
[4]   GAAS BIPOLAR-TRANSISTORS GROWN ON (100) SI SUBSTRATES BY MOLECULAR-BEAM EPITAXY [J].
FISCHER, R ;
CHAND, N ;
KOPP, W ;
MORKOC, H ;
ERICKSON, LP ;
YOUNGMAN, R .
APPLIED PHYSICS LETTERS, 1985, 47 (04) :397-399
[5]   A DC AND MICROWAVE COMPARISON OF GAAS-MESFETS ON GAAS AND SI SUBSTRATES [J].
FISCHER, RJ ;
CHAND, N ;
KOPP, WF ;
PENG, CK ;
MORKOC, H ;
GLEASON, KR ;
SCHEITLIN, D .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (02) :206-213
[6]  
LEE JW, 1986 SPRING M MAT RE
[7]   OPTICAL-PROPERTIES OF GAAS ON (100) SI USING MOLECULAR-BEAM EPITAXY [J].
MASSELINK, WT ;
HENDERSON, T ;
KLEM, J ;
FISCHER, R ;
PEARAH, P ;
MORKOC, H ;
HAFICH, M ;
WANG, PD ;
ROBINSON, GY .
APPLIED PHYSICS LETTERS, 1984, 45 (12) :1309-1311
[8]   A SILICON SOLUTION FOR GALLIUM-ARSENIDE ICS [J].
ROBINSON, AL .
SCIENCE, 1986, 232 (4752) :826-828
[9]   ROOM-TEMPERATURE LASER OPERATION OF AIGAAS GAAS DOUBLE HETEROSTRUCTURES FABRICATED ON SI SUBSTRATES BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
SAKAI, S ;
SOGA, T ;
TAKEYASU, M ;
UMENO, M .
APPLIED PHYSICS LETTERS, 1986, 48 (06) :413-414
[10]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS ON SI(211) [J].
UPPAL, PN ;
KROEMER, H .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (06) :2195-2203