ELLIPSOMETRIC CHARACTERIZATION OF HYDROGEN-RICH OXYNITRIDE FILMS

被引：5

作者：

BORGHESI, A

SASSELLA, A

ROJAS, S

机构：

[1] UNIV PAVIA,DIPARTIMENTO FIS A VOLTA,I-27100 PAVIA,ITALY

[2] SGS THOMSON MICROELECTR,I-20041 AGRATE B,ITALY

来源：

THIN SOLID FILMS | 1993年 / 233卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(93)90096-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Spectroscopic ellipsometry measurements on different plasma-enhanced chemical vapour deposited oxynitrides are reported in the 0.23-0.90 mum range. Results of direct calculation and of best-fit procedures based on the Sellmeier model and on the Bruggeman effective medium approximation used to obtain optical functions of the samples are compared.

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页码：227 / 230

页数：4

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