NON-DESTRUCTIVE ANALYSIS OF SI3N4-SIO2-SI STRUCTURES USING SPECTROSCOPIC ELLIPSOMETRY

被引：24

作者：

THEETEN, JB

ASPNES, DE

SIMONDET, F

ERMAN, M

MURAU, PC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 11期

关键词：

D O I：

10.1063/1.328633

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：6788 / 6797

页数：10

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