SILICIDE INTERFACE STOICHIOMETRY

被引:48
作者
FREEOUF, JL
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期
关键词
D O I
10.1116/1.570993
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:910 / 916
页数:7
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