HETEROEPITAXIAL GROWTH OF YTTRIA-STABILIZED ZIRCONIA (YSZ) ON SILICON

被引：72

作者：

FUKUMOTO, H

IMURA, T

OSAKA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 08期

关键词：

D O I：

10.1143/JJAP.27.L1404

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1404 / L1405

页数：2

共 11 条

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[7] NISHIBAYASHI Y, 1988, 1988 P SPRING M MAT
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[9] EVALUATION OF CRYSTALLINE QUALITY OF ZIRCONIUM DIOXIDE FILMS ON SILICON BY MEANS OF ION-BEAM CHANNELING
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