FABRICATION AND CHARACTERIZATION OF LATERAL CUSP-EDGE AND KNIFE-EDGE GEOMETRY CATHODES

被引：8

作者：

KIM, JM

CARR, WN

ZETO, RJ

机构：

[1] NEW JERSEY INST TECHNOL,MICROELECTR RES CTR,NEWARK,NJ 07102

[2] USA,RES LAB,FT MONMOUTH,NJ 07703

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 02期

关键词：

D O I：

10.1116/1.586884

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Two lift-off techniques are demonstrated to form lateral field emission cathodes by shadowing a sputter deposition for tungsten composite. A current of 26 muA is observed for ''knife-edge'' cathodes of 23 mum edge length. The I-V characteristics are consistent with the Fowler-Nordheim relationship. The effect of focusing electrodes for increasing anode collection efficiency is consistent with our electron trajectory tracing simulations. The fabrication process for these devices is described in detail.

引用

页码：459 / 463

页数：5

共 16 条

[1] A COMPARISON OF TUNGSTEN FILM DEPOSITION TECHNIQUES FOR VERY LARGE-SCALE INTEGRATION TECHNOLOGY [J].