HIGH-SPEED INP/INGAAS HBTS OPERATED AT SUBMILLIAMPERE COLLECTOR CURRENTS

被引:10
作者
NAKAJIMA, H
KURISHIMA, K
YAMAHATA, S
KOBAYASHI, T
MATSUOKA, Y
机构
[1] NTT LSI Laboratories, Kanagawa, 243-01, 3-1, Morinosato Wakamiya, Atsugishi
关键词
HETEROJUNCTION BIPOLAR TRANSISTORS; CHEMICAL VAPOR DEPOSITION;
D O I
10.1049/el:19931256
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Extremely small-emitter InP/InGaAs heterojunction bipolar transistors have been fabricated by using a selfalignment technique on MOCVD-grown material. Fabricated devices with a 1 x 2 mum2 emitter electrode showed f(T) exceeding 100GHz at submilliampere collector currents of I(C) >0.6mA. A maximum f(T) of 163GHz at I(C) = 2.3mA ranks with the f(T) = 176GHz achieved by a simultaneously fabricated 2 x 20 mum2 transistor at I(C) = 45mA.
引用
收藏
页码:1887 / 1888
页数:2
相关论文
共 8 条
[1]   SUBPICOSECOND INP/INGAAS HETEROSTRUCTURE BIPOLAR-TRANSISTORS [J].
CHEN, YK ;
NOTTENBURG, RN ;
PANISH, MB ;
HAMM, RA ;
HUMPHREY, DA .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (06) :267-269
[2]   SUPPRESSION OF ABNORMAL ZN DIFFUSION IN INP/INGAAS HETEROJUNCTION BIPOLAR-TRANSISTOR STRUCTURES [J].
KOBAYASHI, T ;
KURISHIMA, K ;
GOSELE, U .
APPLIED PHYSICS LETTERS, 1993, 62 (03) :284-285
[3]   ABNORMAL REDISTRIBUTION OF ZN IN INP/INGAAS HETEROJUNCTION BIPOLAR-TRANSISTOR STRUCTURES [J].
KURISHIMA, K ;
KOBAYASHI, T ;
GOSELE, U .
APPLIED PHYSICS LETTERS, 1992, 60 (20) :2496-2498
[4]   INP/INGAAS HETEROSTRUCTURE BIPOLAR-TRANSISTORS GROWN AT LOW-TEMPERATURE BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
KURISHIMA, K ;
MAKIMOTO, T ;
KOBAYASHI, T ;
ISHIBASHI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (2B) :L258-L261
[5]  
Matsuoka Y., 1991, International Electron Devices Meeting 1991. Technical Digest (Cat. No.91CH3075-9), P797, DOI 10.1109/IEDM.1991.235304
[6]  
NAKAJIMA H, 1993, FIFTH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS, P13
[7]  
NAKAJIMA H, IN PRESS IEEE T ELEC
[8]   HIGH-CURRENT-GAIN SUBMICROMETER INGAAS/INP HETEROSTRUCTURE BIPOLAR-TRANSISTORS [J].
NOTTENBURG, RN ;
CHEN, YK ;
PANISH, MB ;
HAMM, R ;
HUMPHREY, DA .
IEEE ELECTRON DEVICE LETTERS, 1988, 9 (10) :524-526