TRANSPORT OF SODIUM IONS IN SILICON DIOXIDE FILMS USING MOS STRUCTURE

被引:10
作者
SINGH, BR
SRIVASTAVA, RS
RAI, SS
机构
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1972年 / 13卷 / 01期
关键词
D O I
10.1002/pssa.2210130103
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:51 / +
页数:1
相关论文
共 23 条
[1]   STABILIZATION OF SILICON SURFACES BY THERMALLY GROWN OXIDES [J].
ATALLA, MM ;
TANNENBAUM, E ;
SCHEIBNER, EJ .
BELL SYSTEM TECHNICAL JOURNAL, 1959, 38 (03) :749-783
[2]   N-TYPE SURFACE CONDUCTIVITY ON P-TYPE GERMANIUM [J].
BROWN, WL .
PHYSICAL REVIEW, 1953, 91 (03) :518-527
[3]   STUDIES OF SODIUM IN SIO2 FILMS BY NEUTRON ACTIVATION AND RADIOTRACER TECHNIQUES [J].
BUCK, TM ;
ALLEN, FG ;
DALTON, JV ;
STRUTHERS, JD .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (08) :862-+
[4]  
BURGERS TE, 1966, MAY M EL SOC CLEV
[5]   TRACER EVALUATION OF HYDROGEN IN STEAM-GROWN SIO2 FILMS [J].
BURKHARD.PJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (2P1) :196-&
[6]  
CARLSON HG, 1966, PHYS FAIL ELECTRON, V4, P390
[7]   ELECTRICAL PROPERTIES OF VAPOR-DEPOSITED SILICON NITRIDE AND SILICON OXIDE FILMS ON SILICON [J].
DEAL, BE ;
FLEMING, PJ ;
CASTRO, PL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (03) :300-&
[8]   CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON [J].
DEAL, BE ;
SKLAR, M ;
GROVE, AS ;
SNOW, EH .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (03) :266-+
[9]   INVESTIGATION OF THERMALLY OXIDISED SILICON SURFACES USING METAL-OXIDE-SEMICONDUCTOR STRUCTURES [J].
GROVE, AS ;
DEAL, BE ;
SNOW, EH ;
SAH, CT .
SOLID-STATE ELECTRONICS, 1965, 8 (02) :145-+