ANNEALING AND CRYSTALLIZATION PROCESSES IN A HYDROGENATED AMORPHOUS SI-C ALLOY FILM

被引：160

作者：

BASA, DK ^{[1
]}

SMITH, FW ^{[1
]}

机构：

[1] CUNY CITY COLL,DEPT PHYS,NEW YORK,NY 10031

来源：

THIN SOLID FILMS | 1990年 / 192卷 / 01期

关键词：

Silicon and Alloys;

D O I：

10.1016/0040-6090(90)90483-T

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A hydrogenated amorphous SiC alloy film (a-Si1-xCx:H with x = 0.29) was prepared by glow discharge decomposition of a silane and ethylene gas mixture. A careful and detailed investigation of the IR absorption was undertaken in the range from 400 to 4000 cm-1 for both the as-deposited (Ts = 250°C) and annealed (up to 1200°C) film. In addition to the changes in the local bonding brought about by annealing, the study demonstrates clearly that there is a structural change from amorphous to microcrystalline at Ta = 800°C and then to a crystalline phase at Ta = 1200°C. © 1990.

引用

页码：121 / 133

页数：13

共 31 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS SILICON-CARBIDE, SILICON-NITRIDE AND GERMANIUM CARBIDE PREPARED BY GLOW-DISCHARGE TECHNIQUE
ANDERSON, DA
SPEAR, WE
[J]. PHILOSOPHICAL MAGAZINE, 1977, 35 (01): : 1 - 16
[2] BASA DK, 1989, THESIS CITY U NEW YO
[3] BASA DK, IN PRESS
[4] STRUCTURAL INFORMATION FROM THE RAMAN-SPECTRUM OF AMORPHOUS-SILICON
BEEMAN, D
TSU, R
THORPE, MF
[J]. PHYSICAL REVIEW B, 1985, 32 (02): : 874 - 878
[5] BONDING OF FLUORINE IN AMORPHOUS HYDROGENATED SILICON
FANG, CJ
LEY, L
SHANKS, HR
GRUNTZ, KJ
CARDONA, M
[J]. PHYSICAL REVIEW B, 1980, 22 (12): : 6140 - 6148
[6] HYDROGEN CONTENT IN A-SIC-H FILMS PREPARED BY PLASMA DECOMPOSITION OF SILANE AND METHANE OR ETHYLENE
FUJIMOTO, F
OOTUKA, A
KOMAKI, K
IWATA, Y
YAMANE, I
YAMASHITA, H
HASHIMOTO, Y
TAWADA, Y
NISHIMURA, K
OKAMOTO, H
HAMAKAWA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (07): : 810 - 814
[7] RAMAN-SCATTERING FROM SMALL PARTICLE-SIZE POLYCRYSTALLINE SILICON
IQBAL, Z
VEPREK, S
WEBB, AP
CAPEZZUTO, P
[J]. SOLID STATE COMMUNICATIONS, 1981, 37 (12) : 993 - 996
[8] CHEMICAL BONDING STATES IN THE AMORPHOUS SIXC1-X-H SYSTEM STUDIED BY X-RAY PHOTOEMISSION SPECTROSCOPY AND INFRARED-ABSORPTION SPECTRA
KATAYAMA, Y
USAMI, K
SHIMADA, T
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (02): : 283 - 294
[9] BEHAVIOR OF PLASMONS IN AN AMORPHOUS SILICON-CARBON ALLOY SYSTEM STUDIED BY X-RAY PHOTOELECTRON-SPECTROSCOPY
KATAYAMA, Y
SHIMADA, T
USAMI, K
[J]. PHYSICAL REVIEW LETTERS, 1981, 46 (17) : 1146 - 1149
[10] LANNIN JS, 1984, SEMICONDUCTORS SEM B, V21

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