MEASUREMENT OF THE SPHERICAL-ABERRATION COEFFICIENT OF TRANSMISSION ELECTRON-MICROSCOPES BY BEAM-TILT-INDUCED IMAGE DISPLACEMENTS

被引：23

作者：

KOSTER, AJ ^{[1
]}

DEJONG, AF ^{[1
]}

机构：

[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

ULTRAMICROSCOPY | 1991年 / 38卷 / 3-4期

关键词：

D O I：

10.1016/0304-3991(91)90158-3

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A method is presented to measure the spherical aberration constant of a transmission electron microscope with high precision. The method is based on the measurement of a series of beam-tilt-induced image displacements. The displacements are calculated via cross-correlation and subsequently fitted to a third-order polynomial in the beam tilt. Calibration of the magnification and of the beam-tilt coils is a crucial step. The spherical aberration constant of two microscopes is measured with a precision better than 1%, apart from calibration errors. A computer is used to direct the experiments via remote control of the microscope and perform fast image processing to calculate the cross-correlations.

引用

页码：235 / 240

页数：6

共 12 条

[1] MEASUREMENT OF FOCUS AND SPHERICAL-ABERRATION OF AN ELECTRON-MICROSCOPE OBJECTIVE LENS [J].