EJECTION PATTERNS IN LOW-ENERGY SPUTTERING OF GAAS AND GAP CRYSTALS

被引:4
作者
COMAS, J
COOPER, CB
机构
关键词
D O I
10.1063/1.1656042
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5736 / &
相关论文
共 16 条
[1]   ATOM EJECTION STUDIES FOR SPUTTERING OF SEMICONDUCTORS [J].
ANDERSON, GS .
JOURNAL OF APPLIED PHYSICS, 1966, 37 (09) :3455-&
[2]   TEMPERATURE DEPENDENCE OF EJECTION PATTERNS IN GE, SI, INSB, AND INAS SPUTTERING [J].
ANDERSON, GS ;
WEHNER, GK .
SURFACE SCIENCE, 1964, 2 :367-375
[4]   MASS-SPECTROMETRIC STUDY OF SPUTTERING OF SINGLE CRYSTALS OF GAAS BY LOW-ENERGY A IONS [J].
COMAS, J ;
COOPER, CB .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (07) :2956-&
[5]   SPUTTERING YIELDS OF SEVERAL SEMICONDUCTING COMPOUNDS UNDER ARGON ION BOMBARDMENT [J].
COMAS, J ;
COOPER, CB .
JOURNAL OF APPLIED PHYSICS, 1966, 37 (07) :2820-&
[6]   ANGULAR DISTRIBUTION OF SUBLIMED AND SPUTTERED PARTICLES FROM AG SINGLE CRYSTALS [J].
COOPER, CB ;
COMAS, J .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (09) :2891-&
[7]   SPOT PATTERNS AND SILSBEE CHAINS ON A CU SINGLE CRYSTAL - (COMPUTER SIMULATION AR+ T) [J].
HARRISON, DE ;
JOHNSON, JP ;
LEVY, NS .
APPLIED PHYSICS LETTERS, 1966, 8 (02) :33-&
[8]   ON MECHANISM OF SPUTTERING [J].
LEHMANN, C ;
SIGMUND, P .
PHYSICA STATUS SOLIDI, 1966, 16 (02) :507-&
[9]  
MACRAE AU, 1966, SURF SCI, V4, P247
[10]  
OLSEN NT, 1967, PHYS REV, V157, P241