THE EFFECT OF NEAR-SURFACE STRUCTURE ON SPUTTERING OF CU ATOMS BY AR IONS

被引：7

作者：

HAUTALA, M ^{[1
]}

LIKONEN, J ^{[1
]}

机构：

[1] TECH RES CTR FINLAND,REACTOR LAB,SF-02150 ESPOO,FINLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90622-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：526 / 529

页数：4

共 19 条

[1]

ECKSTEIN W, 1984, APPL PHYS A, V34, P73

[2] NUCLEAR STOPPING IN POLYCRYSTALLINE MATERIALS - RANGE DISTRIBUTIONS AND DOPPLER-SHIFT ATTENUATION ANALYSIS [J].

HAUTALA, M .

PHYSICAL REVIEW B, 1984, 30 (09) :5010-5018

[3] COMPUTER-SIMULATION OF LOW-ENERGY SPUTTERING IN THE BINARY COLLISION APPROXIMATION [J].

HOU, M ;

ROBINSON, MT .

APPLIED PHYSICS, 1979, 18 (04) :381-389

[4] COMPUTER-SIMULATION OF LOW-ENERGY STATIC SINGLE-CRYSTAL SPUTTERING [J].

HOU, M ;

ECKSTEIN, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3) :324-330

[5] COMPUTER-SIMULATED SPUTTERING OF POLYCRYSTALLINE TARGETS BY 40-KEV ARGON IONS [J].

KARPUZOV, DS .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :109-113

[6] ON MECHANISM OF SPUTTERING [J].

LEHMANN, C ;

SIGMUND, P .

PHYSICA STATUS SOLIDI, 1966, 16 (02) :507-&

[7] SPUTTERING OF CU ATOMS BY AR IONS [J].

LIKONEN, J ;

HAUTALA, M .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (02) :137-150

[8]

Robinson M. T., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P73

[9] COMPUTER-SIMULATION OF SINGLE-CRYSTAL AND POLYCRYSTAL SPUTTERING .2. [J].

SHULGA, VI .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1984, 82 (3-4) :169-187

[10] COMPUTER-SIMULATION OF SINGLE-CRYSTAL AND POLYCRYSTAL SPUTTERING .1. [J].

SHULGA, VI .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4) :65-83

← 1 2 →