STUDY OF SI/SIO2 INTERFACE BY TRANSVERSE ACOUSTOELECTRIC VOLTAGE MEASUREMENTS

被引:3
作者
ABBATE, A
PALMA, F
机构
关键词
D O I
10.1063/1.102472
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1306 / 1308
页数:3
相关论文
共 9 条
[1]   NONDESTRUCTIVE EVALUATION OF THE SEMICONDUCTOR INTERFACE STATES DENSITY USING THE TRANSVERSE ACOUSTOELECTRIC VOLTAGE [J].
DAVARI, B ;
AZAR, MT ;
LIU, T ;
DAS, P .
SOLID-STATE ELECTRONICS, 1986, 29 (01) :75-81
[2]   OBSERVATION OF AN INTERMEDIATE CHEMICAL STATE OF SILICON IN SI-SIO2 INTERFACE BY AUGER SPUTTER PROFILING [J].
HELMS, CR ;
STRAUSSER, YE ;
SPICER, WE .
APPLIED PHYSICS LETTERS, 1978, 33 (08) :767-769
[3]   THEORY OF THE ELECTRONIC-STRUCTURE OF THE SI-SIO2 INTERFACE [J].
LAUGHLIN, RB ;
JOANNOPOULOS, JD ;
CHADI, DJ .
PHYSICAL REVIEW B, 1980, 21 (12) :5733-5744
[5]  
PALMA F, 1986, P IEEE ULTRASON S, P457
[6]  
PALMA F, 1988, P IEEE ULTRASON S, P223
[7]   THEORY OF CONTINUOUSLY DISTRIBUTED TRAP STATES AT SI-SIO2 INTERFACES [J].
SAKURAI, T ;
SUGANO, T .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2889-2896
[8]   DETERMINATION OF DEEP TRAP LEVELS IN SILICON USING ION-IMPLANTATION AND CV-MEASUREMENTS [J].
SCHULZ, M .
APPLIED PHYSICS, 1974, 4 (03) :225-236
[9]   THE ORIGIN AND NATURE OF SILICON BAND-GAP STATES AT THE SI-SIO2 INTERFACE [J].
SINGH, J ;
MADHUKAR, A .
APPLIED PHYSICS LETTERS, 1981, 38 (11) :884-886