ION-BOMBARDMENT-ENHANCED ETCHING OF LINBO3 USING DAMAGE PROFILE TAILORING

被引：15

作者：

ASHBY, CIH

ARNOLD, GW

BRANNON, PJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 01期

关键词：

D O I：

10.1063/1.343381

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：93 / 97

页数：5

共 11 条

[1] LASER-DRIVEN CHEMICAL-REACTION FOR ETCHING LINBO3 [J].

ASHBY, CIH ;

BRANNON, PJ .

APPLIED PHYSICS LETTERS, 1986, 49 (08) :475-477

[2]

Buchal C., 1987, Journal of Materials Research, V2, P222, DOI 10.1557/JMR.1987.0222

[3] REFRACTIVE-INDEX PROFILES OF ION-IMPLANTED OPTICAL WAVE-GUIDES [J].

CHANDLER, PJ ;

GLAVAS, E ;

LAMA, F ;

LAX, SE ;

TOWNSEND, PD .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1986, 98 (1-4) :211-226

[4] ION-IMPLANTATION INTO LINBO3 [J].

GOTZ, G ;

KARGE, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1079-1088

[5] RIDGE WAVE-GUIDES AND ELECTRO-OPTICAL SWITCHES IN LINBO3 FABRICATED BY ION-BOMBARDMENT-ENHANCED ETCHING [J].

KAWABE, M ;

HIRATA, S ;

NAMBA, S .

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS, 1979, 26 (12) :1109-1113

[6]

KAWABE M, 1978, J VAC SCI TECHNOL, V15, P1098

[7] CF4 PLASMA-ETCHING ON LINBO3 [J].

LEE, CL ;

LU, CL .

APPLIED PHYSICS LETTERS, 1979, 35 (10) :756-758

[8] EFFICIENT LINBO3 BALANCED BRIDGE MODULATOR-SWITCH WITH AN ION-ETCHED SLOT [J].

MINAKATA, M .

APPLIED PHYSICS LETTERS, 1979, 35 (01) :40-42

[9] OPTICAL-PROPERTIES OF PLANAR WAVE-GUIDES FORMED BY HE+ IMPLANTATION IN LINBO3 [J].

NADEN, JM ;

WEISS, BL .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1985, 3 (04) :855-859

[10]

ZHANG B, 1984, IEEE J LIGHTWAVE TEC, V2, P256

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