共 14 条
- [1] IMPLICATIONS IN THE USE OF SPUTTERING FOR LAYER REMOVAL - SYSTEM AU ON SI [J]. RADIATION EFFECTS LETTERS, 1979, 43 (03): : 105 - 110
- [3] SPUTTERING IN SURFACE ANALYSIS OF SOLIDS - DISCUSSION OF SOME PROBLEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05): : 1037 - 1044
- [4] DELINE VR, 1978, APPL PHYS LETT, V33, P932
- [5] ION-INDUCED MIGRATION OF CU INTO SI [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) : 1947 - 1951
- [6] INFLUENCE OF ATOMIC MIXING AND PREFERENTIAL SPUTTERING ON DEPTH PROFILES AND INTERFACES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 121 - 127
- [8] SCHIOTT HE, 1971, ION IMPLANTATION, P197
- [9] SEIDEL TE, 1973, ION IMPLANTATION SEM, P305