VARIABLE-DENSITY HIGH-MOBILITY 2-DIMENSIONAL ELECTRON AND HOLE GASES IN A GATED GAAS/ALXGA1-XAS HETEROSTRUCTURE

被引:97
作者
KANE, BE [1 ]
PFEIFFER, LN [1 ]
WEST, KW [1 ]
HARNETT, CK [1 ]
机构
[1] CORNELL UNIV,DEPT APPL PHYS,ITHACA,NY 14853
关键词
D O I
10.1063/1.110563
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have fabricated undoped GaAs/AlxGa1-xAs heterojunctions in which an electric field produced by a top gate confines carriers to the interface, and where contact is made to carriers at the interface using a novel self-aligned contacting process. Densities for both electrons and holes ranging from n2D < 10(10)/cm2 to n2D > 5 x 10(11)/cm2 are obtainable with mobilities comparable to those measured in high quality modulation-doped heterojunctions.
引用
收藏
页码:2132 / 2134
页数:3
相关论文
共 16 条
[2]   ION-IMPLANTATION AND ANNEALING OF UNDOPED (AL,GA)AS/GAAS HETEROSTRUCTURES [J].
BARATTE, H ;
JACKSON, TN ;
SOLOMON, PM ;
LATULIPE, DC ;
FRANK, DJ ;
MOORE, JS .
APPLIED PHYSICS LETTERS, 1987, 51 (18) :1459-1461
[3]   THE GROWTH AND PHYSICS OF HIGH MOBILITY 2-DIMENSIONAL HOLE GASES [J].
DAVIES, AG ;
FROST, JEF ;
RITCHIE, DA ;
PEACOCK, DC ;
NEWBURY, R ;
LINFIELD, EH ;
PEPPER, M ;
JONES, GAC .
JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) :318-322
[4]   MAXIMUM LOW-TEMPERATURE MOBILITY OF 2-DIMENSIONAL ELECTRONS IN HETEROJUNCTIONS WITH A THICK SPACER LAYER [J].
EFROS, AL ;
PIKUS, FG ;
SAMSONIDZE, GG .
PHYSICAL REVIEW B, 1990, 41 (12) :8295-8301
[5]   WET CHEMICAL ETCHING BEHAVIOR OF GA(AL)AS AND IN(GA)P(AS) LAYERS [J].
FRANZ, G ;
HOYLER, C ;
SACHER, D .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (11A) :2693-2699
[6]   RESONANT FOWLER-NORDHEIM TUNNELING IN N-GAAS-UNDOPED ALXGA1-XAS-N+GAAS CAPACITORS [J].
HICKMOTT, TW ;
SOLOMON, PM ;
FISCHER, R ;
MORKOC, H .
APPLIED PHYSICS LETTERS, 1984, 44 (01) :90-92
[7]   HETEROJUNCTION FETS IN III-V COMPOUNDS [J].
KIEHL, RA ;
SOLOMON, PM ;
FRANK, DJ .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1990, 34 (04) :506-529
[8]  
LAIKHTMAN B, 1990, APPL PHYS LETT, V57, P1558
[9]   N+-GAAS UNDOPED GAALAS UNDOPED GAAS FIELD-EFFECT TRANSISTOR [J].
MATSUMOTO, K ;
OGURA, M ;
WADA, T ;
HASHIZUME, N ;
YAO, T ;
HAYASHI, Y .
ELECTRONICS LETTERS, 1984, 20 (11) :462-463
[10]   HIGH-MOBILITY VARIABLE-DENSITY TWO-DIMENSIONAL ELECTRON-GAS IN INVERTED GAAS-ALGAAS HETEROJUNCTIONS [J].
MEIRAV, U ;
HEIBLUM, M ;
STERN, F .
APPLIED PHYSICS LETTERS, 1988, 52 (15) :1268-1270