REDISTRIBUTION OF ATOMS IN THE NEAR-SURFACE LAYER OF MULTIELEMENTAL SOLIDS RELATED TO VARIATIONS OF THE ION-BEAM PARAMETERS

被引:3
作者
GALDIKAS, A [1 ]
PRANEVICIUS, L [1 ]
机构
[1] VYTAUTAS MAGNUS UNIV,KAUNAS 3000,LITHUANIA
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1994年 / 27卷 / 01期
关键词
DIFFUSION; SPUTTERING; ION BOMBARDMENT; SURFACE COMPOSITION;
D O I
10.1016/0921-5107(94)90149-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The kinetics of the surface composition and the distribution profiles of components in the near-surface layer of multielemental materials affected by ion bombardment are analyzed during the time between two steady-state regimes of sputtering after a sharp increase in the energy or intensity of ion bombardment. The experimentally observed non-monotonic time dependences of the surface composition initiated by sharp changes in the parameters of ion irradiation of multielemental materials are explained on the basis of preferential sputtering and component interdiffusion. It is shown that the redistribution of components in the altered layer leads to non-monotonic variations of the surface composition during the transient period between two steady-state regimes of ion irradiation. Good qualitative agreement between theory and experiment has been obtained after a process of interdiffusion very sensitive to the parameters of ion beam, was included. The conclusion is drawn that the perturbation of any ion-beam parameters that lead to changes in the sputtering rate and interdiffusion coefficient is related to the redistribution of components in the altered layer.
引用
收藏
页码:23 / 28
页数:6
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