INSITU SECONDARY ION MASS-SPECTROMETRY STUDY OF THE SURFACE OXIDATION OF SILICON USING O-18 TRACER

被引：37

作者：

LITTLEWOOD, SD

KILNER, JA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 06期

关键词：

D O I：

10.1063/1.341081

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2173 / 2176

页数：4

共 24 条

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